US 11,952,309 B2
Glass substrate chemical strengthening furnace apparatus
Hoi Kwan Lee, Suwon-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Jul. 28, 2020, as Appl. No. 16/941,220.
Claims priority of application No. 10-2019-0174655 (KR), filed on Dec. 26, 2019.
Prior Publication US 2021/0198141 A1, Jul. 1, 2021
Int. Cl. C03C 21/00 (2006.01); F27B 3/28 (2006.01)
CPC C03C 21/002 (2013.01) 12 Claims
OG exemplary drawing
 
1. A method for chemically strengthening a glass substrate using a glass substrate chemical strengthening furnace apparatus, the glass substrate chemical strengthening furnace apparatus comprising:
a bottom portion and a side wall extending from an edge of the bottom portion, wherein the bottom portion and the side wall define a reaction space; and
a plurality of heaters which provides heat to the reaction space,
wherein the bottom portion includes an inclined portion located at a center thereof and a collection portion disposed between the inclined portion and the side wall,
wherein the collection portion is in a groove shape in which an upper surface thereof is further recessed than the inclined portion,
wherein the plurality of heaters includes a bottom heater disposed in the bottom portion or adjacent to the bottom portion, and
wherein the inclined portion includes:
a first floor extending in a first direction;
a second floor extending in a second direction different from the first direction;
a first inclined portion disposed on both sides of the first floor in the second direction; and
a second inclined portion disposed on both sides of the second floor in the first direction,
wherein the first inclined portion is inclined downward to both sides of the second floor in the first direction,
wherein the second inclined portion is inclined downward to both sides of the first floor in the second direction.