US 11,952,302 B2
Process for the preparation of fluorinated quartz glass
Stefan Ochs, Hanau (DE); Thomas Kayser, Hanau (DE); Martin Trommer, Hanau (DE); Andreas Langner, Hanau (DE); Sascha Pihan, Hanau (DE); Kay Schuster, Hanau (DE); and Michael Hünermann, Hanau (DE)
Assigned to Heraeus Quarzglas GmbH & Co. KG, Hanau (DE)
Filed by Heraeus Quarzglas GmbH & Co. KG, Hanau (DE)
Filed on Aug. 6, 2021, as Appl. No. 17/395,791.
Claims priority of application No. 20189825 (EP), filed on Aug. 6, 2020.
Prior Publication US 2022/0041488 A1, Feb. 10, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. C03B 19/14 (2006.01); C03C 3/06 (2006.01)
CPC C03B 19/143 (2013.01) [C03B 19/1423 (2013.01); C03B 19/1453 (2013.01); C03C 3/06 (2013.01); C03B 2201/12 (2013.01); C03B 2207/30 (2013.01); C03C 2201/12 (2013.01); C03C 2203/40 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A process for the production of fluorinated quartz glass, characterized by:
(a) generating SiO2 particles in a synthesis burner;
(b) depositing the SiO2 particles resulting from process (a) on a substrate to form a body; and
(c) vitrifying the body resulting from process (b),
wherein a fluorinating agent having a boiling point of greater than or equal to −10° C. is introduced to the synthesis burner during process (a),
wherein fluorinating agent is selected from a group comprising:
i. oxygen-containing fluorinating agents;
ii. nitrile-containing fluorinating agents;
iii. mixtures of the oxygen-containing and nitrile-containing fluorinating agents, characterized in that the oxygen-containing fluorinating agents are selected from the group consisting of:
i. Perfluoroketones of the general formula (I)
RF1—CO—RF2  (I),
wherein RF1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; and RF2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms;
ii. Perfluoroethers of the general formula (II)
RF1—C(X1)(X2)O—RF2  (II),
wherein RF1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; RF2 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms; and X1 and X2 are F or CF3;
iii. Hydrofluoroethers of the general formula (III)
RF1—C(X1)(X2)O—RF2  (II),
wherein RF1 is selected from the group consisting of perfluorinated carbon groups having 1 to 7 carbon atoms and fluorine; R2 is a non-fluorinated hydrocarbon group having from 1 to 3 carbon atoms; X1 and X2 stand for F or CF3;
characterized in that the fluorinating agent is supplied to the synthesis burner in liquid or gaseous form.