US 11,951,512 B2
Imaging devices having piezoelectric transceivers with harmonic characteristics
Haesung Kwon, Austin, TX (US); Brian Bircumshaw, Oakland, CA (US); and Sandeep Akkaraju, Wellesley, MA (US)
Assigned to Exo Imaging, Inc., Santa Clara, CA (US)
Filed by eXo Imaging, Inc., Redwood City, CA (US)
Filed on Mar. 31, 2021, as Appl. No. 17/218,656.
Prior Publication US 2022/0314275 A1, Oct. 6, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. B06B 1/06 (2006.01); G01H 11/08 (2006.01); G01N 29/24 (2006.01); B06B 1/02 (2006.01); H10N 30/20 (2023.01)
CPC B06B 1/0622 (2013.01) [G01H 11/08 (2013.01); G01N 29/2406 (2013.01); B06B 1/0292 (2013.01); H10N 30/2047 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A micromachined ultrasonic transducer (MUT), comprising:
a first electrode, when seen in a top view, having first and second end portions along a first axis that extends in a longitudinal direction of the first electrode, the first end portion and the second end portion comprising semi-circular shapes each having a constant radius of curvature R,
wherein a second axis extends in a transverse direction perpendicular to the first axis and passes through a midpoint of the first electrode, the midpoint having a longitudinal location along the first axis, the first electrode being symmetric about both the first axis and the second axis and defining an outer perimeter having longitudinal edges that taper toward the midpoint such that the shape has a narrowest transverse width at the longitudinal location of the midpoint,
wherein a half-width of the first electrode is defined by a length L measured from the midpoint, along the second axis, to the outer perimeter of the first electrode,
wherein a total width of the first electrode at the narrowest transverse width is less than 2R such that the longitudinal edges of the first electrode on either side of the first axis at the first electrode's narrowest point has a concave shape, and
wherein R/L, is greater than 1.