| CPC H01L 23/427 (2013.01) [H01L 24/16 (2013.01); H01L 24/32 (2013.01); H01L 24/73 (2013.01); H01L 25/0657 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/16245 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/73204 (2013.01); H01L 2225/06513 (2013.01); H01L 2225/06517 (2013.01); H01L 2225/06589 (2013.01); H01L 2924/1436 (2013.01); H01L 2924/14511 (2013.01)] | 18 Claims |

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1. A three-dimensional (3D) integrated circuit device, comprising:
a thermal interface material layer configured above or from a substrate;
a plurality of die, a device layer and a micro-bump thermal interface material layer formed above thermal interface material layer;
a heat spreader located above the plurality of die, the device layer and the thermal interface material, the heat spreader comprising a flat-shaped heat pipe selected from a rectangular-shaped heat pipe and a disk-shaped heat pipe; and
a heat sink located above the heat spreader, the heat sink selected from the rectangular-shaped heat pipe and the disk-shaped heat pipe, wherein the flat-shaped heat pipe is employed as both the heat spreader and the heat sink to improve a thermal performance of the 3D IC.
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