US 12,273,051 B2
Apparatus and method for contactless transportation of a carrier
Thorsten Meiss, Darmstadt (DE); and Alexander Sendobry, Muhltal (DE)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 14, 2022, as Appl. No. 18/081,493.
Prior Publication US 2024/0204696 A1, Jun. 20, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01H 47/00 (2006.01); H02N 15/00 (2006.01)
CPC H02N 15/00 (2013.01) 20 Claims
OG exemplary drawing
 
1. An apparatus for contactless transportation of a carrier, comprising:
the carrier, being a substrate carrier or a mask carrier;
a linear reluctance motor for providing both a contactless levitation and a contactless drive of the carrier, comprising:
one or more linear stators defining a transportation track for the carrier;
a mover connected to the carrier; and
a set of electromagnets and a first magnetic material, wherein the one or more linear stators include the set of electromagnets and the mover includes the first magnetic material, or the mover includes the set of electromagnets and the one or more linear stators include the first magnetic material; and
a controller connected to the set of electromagnets.