US 12,272,921 B2
Methods to apply microlens on small aperture photodetectors and VCSEL for high data rate
Tak Kui Wang, San Jose, CA (US); Rashit Nabiev, San Jose, CA (US); Ramana M. V. Murty, San Jose, CA (US); and Laura M. Giovane, San Jose, CA (US)
Assigned to Broadcom International Pte. Ltd., Singapore (SG)
Filed by Broadcom International Pte. Ltd., Singapore (SG)
Filed on Oct. 25, 2021, as Appl. No. 17/509,596.
Claims priority of provisional application 63/132,711, filed on Dec. 31, 2020.
Prior Publication US 2022/0209496 A1, Jun. 30, 2022
Int. Cl. H01S 5/02326 (2021.01); H01L 31/0232 (2014.01); H01L 31/18 (2006.01); H01S 5/02253 (2021.01); H01S 5/0234 (2021.01); H01S 5/0239 (2021.01); H01S 5/183 (2006.01)
CPC H01S 5/02326 (2021.01) [H01L 31/02327 (2013.01); H01L 31/186 (2013.01); H01S 5/02253 (2021.01); H01S 5/0234 (2021.01); H01S 5/0239 (2021.01); H01S 5/183 (2013.01)] 24 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a lens comprising a first lens surface and a second lens surface opposite the first lens surface, the second lens surface comprising a first metal pad; and
a device layer comprising an optical device, a first device surface and a second device surface opposite the first device surface, wherein the first device surface is coupled to the second lens surface, wherein a portion of the device layer is removed at the second device surface to expose a second metal layer surface of a first metal layer at the first device surface, the first metal pad being attached to a first metal surface of the first metal layer at the first device surface, the second metal layer surface being opposite the first metal layer surface, wherein the second device surface includes a second pad on an unremoved portion of the device layer at the second device surface, wherein the second metal layer surface is intermediate the first metal layer surface and the second device surface.