US 12,272,584 B2
Die-bonding machine
Xinrong Hu, Shenzhen (CN); Gang Huang, Shenzhen (CN); Guopeng Zeng, Shenzhen (CN); and Chuxiong Yan, Shenzhen (CN)
Assigned to SHENZHEN XINYICHANG TECHNOLOGY CO., LTD, Shenzhen (CN)
Filed by SHENZHEN XINYICHANG TECHNOLOGY CO., LTD, Shenzhen (CN)
Filed on Apr. 25, 2022, as Appl. No. 17/727,938.
Claims priority of application No. 202111674090.9 (CN), filed on Dec. 31, 2021.
Prior Publication US 2023/0215756 A1, Jul. 6, 2023
Int. Cl. H01L 21/68 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68 (2013.01) [H01L 21/67132 (2013.01); H01L 21/67144 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A die-bonding machine, comprising:
a transferring unit, used to support and transfer a substrate to a bonding position;
a feeding unit, used to position and supply the substrate to the transferring unit;
a die supply unit, used to support a die ring and supply dies to a die supply position;
a die ring supply unit, used to supply full die rings to the die supply unit and recover empty die rings in the die supply unit;
a turret mechanism, configured for transferring the dies in the die supply position to a die extraction position;
a piercing mechanism, configured for downwardly piercing a blue film of a die on the die supply position to push the die to the turret mechanism; and,
a die-bonding mechanism, configured for sucking the die from the die extraction position and moving the die to the bonding position to be installed on the substrate;
wherein the turret mechanism is arranged between the piercing mechanism and the die-bonding mechanism, the piercing mechanism is arranged on one side of the die supply unit, the transferring unit is arranged on one side of the feeding unit, the feeding unit is located underneath the die-bonding mechanism;
wherein the transferring unit comprises a splint mechanism for supporting and clamping the substrate and a plane movement platform for driving the splint mechanism to move on a plane; and
the splint mechanism comprises:
a support base plate, installed on the plane movement platform;
two sets of roller assemblies installed on opposite sides of the support base plate respectively, and used to cooperate with the opposite sides of the substrate; and,
two sets of clamping assemblies installed on opposite sides of the support base plate respectively, and used to press and fix the opposite sides of the substrate on corresponding roller assemblies, so that each clamping assembly and corresponding roller assembly cooperates to clamp and fix side edges of the substrate; and
wherein the two sets of roller assemblies comprise a roller support supported on the support base plate; a plurality of roller seats are arranged on the roller support; a plurality of the roller seats are arranged at intervals along a length direction of the roller supports; and rollers are rotatably installed on each of the roller seats.