| CPC H01L 21/67733 (2013.01) [B66C 19/00 (2013.01); H01L 21/67724 (2013.01); B65G 1/0464 (2013.01); H01L 21/6773 (2013.01)] | 5 Claims |

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1. An overhead transport system comprising:
an overhead transport vehicle including a conveyor to travel on rails arranged at least partially in a grid pattern, and a body suspended from the conveyor to hold articles below the rails; and
a controller configured or programmed to control operations of the overhead transport vehicle; wherein
the conveyor includes wheels each being steerable at each of four corners of the body;
the rails include a plurality of straight rails and a plurality of intersection rails;
the straight rails and the intersection rails are alternately arranged with a gap in each of a first direction and a second direction perpendicular to the first direction;
the controller is configured or programmed to execute steering control to steer the wheels in a state in which each of the wheels is positioned on one of the intersection rails different from one another; and
a steering center of the wheel under the steering control is on the intersection rail and inward of the body from a ground contact point of the wheel on the intersection rail.
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