US 12,272,578 B2
Teaching method for transfer device, and transfer system
Takashi Sugimoto, Yamanashi (JP); and Shinya Okano, Yamanashi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Mar. 10, 2022, as Appl. No. 17/691,459.
Claims priority of application No. 2021-042857 (JP), filed on Mar. 16, 2021.
Prior Publication US 2022/0299980 A1, Sep. 22, 2022
Int. Cl. H01L 21/67 (2006.01); B25J 9/16 (2006.01); B25J 11/00 (2006.01); G05B 19/418 (2006.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67259 (2013.01) [B25J 9/1697 (2013.01); B25J 11/0095 (2013.01); G05B 19/4189 (2013.01); H01L 21/67265 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); G05B 2219/36433 (2013.01); G05B 2219/45051 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A teaching method for a transfer device that includes a pick configured to hold a substrate and a mapping sensor, comprising:
detecting a position of an edge of the substrate arranged in a teaching target module by the mapping sensor and setting a teaching position in one horizontal direction;
transferring the substrate from the teaching target module to a stage of an alignment device by the pick based on the set teaching position;
rotating the stage by a predetermined angle and detecting a locus of the position of the edge of the substrate; and
estimating an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.
 
9. A transfer system, comprising:
a transfer device including a pick configured to hold a substrate and a mapping sensor;
an alignment device; and
a controller,
wherein the controller is configured to:
control the transfer device to detect a position of an edge of the substrate arranged in a teaching target module by the mapping sensor;
set a teaching position in one horizontal direction based on the detected position of the edge of the substrate;
control the transfer device to transfer the substrate from the teaching target module to a stage of the alignment device by the pick based on the set teaching position;
control the alignment device to rotate the stage by a predetermined angle and detect a locus of the position of the edge of the substrate; and
estimate an eccentricity amount between the stage and the substrate based on the detected locus of the position of the edge of the substrate.