US 12,272,567 B2
Manufacturing method for high-frequency package
Hiromasa Tanobe, Tokyo (JP)
Assigned to NIPPON TELEGRAPH AND TELEPHONE CORPORATION, Tokyo (JP)
Appl. No. 17/765,475
Filed by Nippon Telegraph and Telephone Corporation, Tokyo (JP)
PCT Filed Jul. 30, 2020, PCT No. PCT/JP2020/029206
§ 371(c)(1), (2) Date Mar. 31, 2022,
PCT Pub. No. WO2022/024289, PCT Pub. Date Feb. 3, 2022.
Prior Publication US 2022/0375766 A1, Nov. 24, 2022
Int. Cl. H01L 21/48 (2006.01); H01L 23/498 (2006.01); H01P 11/00 (2006.01)
CPC H01L 21/4853 (2013.01) [H01L 23/49811 (2013.01); H01P 11/003 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A manufacturing method for a high-frequency package, comprising:
a first step of preparing a package main body including:
a substrate comprising alternately laminated insulator layers and conductor layers,
a first differential coplanar line on a first surface of the substrate,
a second differential coplanar line on a second surface of the substrate, the second surface of the substrate is on a side of a mounting surface of the substrate, the second differential coplanar line being connected to the first differential coplanar line,
a first signal pad arranged on a side of the second surface of the substrate and connected to a first signal line of the second differential coplanar line,
a second signal pad arranged on the side of the second surface of the substrate and connected to a second signal line of the second differential coplanar line, and
two ground pads arranged on the side of the second surface of the substrate and connected to two ground lines of the second differential coplanar line;
a second step of preparing a first lead frame comprising a plate-shaped first frame, a first lead, and a second lead, each of the first lead and the second lead including a linear portion extending on a plane including a plane of the first lead frame, a bent portion bent in a direction for separating from the plane including the plane of the first frame, and a distal end portion at a tip of the bent portion, in which an interval between the distal end portion of the first lead and the distal end portion of the second lead is an interval between the first signal pad and the second signal pad;
a third step of preparing a second lead frame including a second frame and two third leads, each of the two third leads including a linear portion extending on a plane including a plane of the second frame, a bent portion bent in a direction for separating from the plane including the plane of the second frame, and a distal end portion at a tip of the bent portion, in which an interval between the distal end portions of the two third leads is an interval between the two ground pads;
a fourth step of connecting the distal end portion of the first lead of the first lead frame to the first signal pad, connecting the distal end portion of the second lead to the second signal pad, and connecting the distal end portions of the two third leads of the second lead frame to the two ground pads;
a fifth step of, after the fourth step, separating the first frame from the first lead and the second lead, and separating the second frame from the two third leads;
a sixth step of, after the fifth step, adjusting an interval between the linear portion of the first lead and the linear portion of the second lead; and
a seventh step of, after the sixth step, aligning lengths of the first lead, the second lead, and the two third leads.