US 12,272,532 B2
Inductive broad-band sensors for electromagnetic waves
Stephen E. Savas, San Jose, CA (US); Alexandre De Chambrier, San Jose, CA (US); and Ivan Shkurenkov, San Jose, CA (US)
Assigned to COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed by COMET TECHNOLOGIES USA, INC., San Jose, CA (US)
Filed on Oct. 11, 2023, as Appl. No. 18/484,565.
Application 18/484,565 is a division of application No. 17/144,983, filed on Jan. 8, 2021, granted, now 11,830,708.
Claims priority of provisional application 62/959,611, filed on Jan. 10, 2020.
Prior Publication US 2024/0145221 A1, May 2, 2024
Int. Cl. H01J 37/32 (2006.01); G01R 27/26 (2006.01)
CPC H01J 37/32917 (2013.01) [G01R 27/2605 (2013.01); H01J 37/32183 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/332 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A broad-band sensor for a radio frequency plasma processing system comprising:
a capacitive pickup for electrical potentials disposed on an electrically conducting component of a reaction chamber;
a lead that comprises a circuit, the lead connecting the pickup to a connector mounted into an electrically grounded plate proximate the pickup with an electrical resistance of the circuit and a capacitance to an electrical ground of the connector being such that the pickup voltage differs by less than 5% from a surface voltage of the electrically conducting component; and
an attenuator circuit connected to the connector, comprising at least one current limiting resistor in series from an attenuator input to an attenuator output; and
wherein the broad-band sensor has detection within a radio frequency range from about 10 KHz to at least about 1 GHz for radio frequency electrical potential measurements in the radio frequency plasma processing system.