| CPC H01J 37/32183 (2013.01) [H01J 37/32917 (2013.01); H01J 2237/24592 (2013.01)] | 15 Claims |
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1. A system for analyzing, qualifying or testing radio frequency (RF) components, comprising:
a variable impedance network comprising:
a first node that is adapted for coupling to a first resistance element; and
adjustable tuning elements for transforming the resistance coupled to the first node into a plurality of impedances at a second node, wherein the second node is configured to be coupled to an RF power source; and
an impedance matching network having an input coupled to an output of the RF power source and an output adapted for coupling to the second node of the variable impedance network; and
one or more RF voltage sensors, one or more RF current sensors, and a frequency detector that are each coupled to the second node of the variable impedance network; and
a test unit controller coupled to the adjustable tuning elements, wherein the test unit controller is programmed to perform operations comprising:
controlling the adjustment of the adjustable tuning elements for selected ones of the plurality of impedances at the second node; and
determining that the impedance matching network is qualified by comparing a signal from at least one of RF voltage sensors, RF current sensors or the frequency detector to at least one of RF voltage sensor data, RF current sensor data and frequency detector data stored in memory.
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