US 12,272,523 B2
Extremum-seeking control apparatuses and methods for automatic frequency tuning
Aaron Burry, Ontario, NY (US); and Vladimir Kozitsky, Rochester, NY (US)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on Sep. 6, 2022, as Appl. No. 17/903,749.
Prior Publication US 2024/0079211 A1, Mar. 7, 2024
Int. Cl. H01J 37/32 (2006.01); H03K 5/00 (2006.01)
CPC H01J 37/32183 (2013.01) [H03K 5/00006 (2013.01)] 34 Claims
OG exemplary drawing
 
1. A radio frequency (RF) generator for powering a load, the RF generator comprising:
a RF power source configured to generate an output signal at an output frequency;
an extremum-seeking frequency controller configured to generate a frequency control signal, the frequency control signal varying the output frequency of the RF power source, the frequency control signal is formed from a gradient signal; and
a gradient estimator configured to generate the gradient signal,
wherein a frequency of the frequency control signal is adjusted based on the gradient signal,
wherein the gradient estimator is configured to receive frequency values of the frequency control signal and corresponding output response values, and
wherein the gradient signal is generated based on the frequency values and the output response values.