US 12,272,512 B2
Ionization detector and detection method
Michael Bachmann, Munich (DE); Andreas Schels, Munich (DE); Florian Herdl, Kiefersfelden (DE); Stefan Zimmermann, Burgwedel (DE); Simon Edler, Munich (DE); and Erik Bunert, Langenhagen (DE)
Assigned to KETEK GmbH Halbleiter-und Reinraumtechnik, Munich (DE)
Filed by KETEK GmbH Halbleiter-und Reinraumtechnik, Munich (DE)
Filed on May 11, 2023, as Appl. No. 18/316,194.
Claims priority of application No. 102022111959.9 (DE), filed on May 12, 2022.
Prior Publication US 2023/0369001 A1, Nov. 16, 2023
Int. Cl. H01J 1/312 (2006.01); C23C 16/26 (2006.01); C23C 16/34 (2006.01); H01L 21/02 (2006.01)
CPC H01J 1/312 (2013.01) [C23C 16/26 (2013.01); C23C 16/342 (2013.01); H01J 2201/3125 (2013.01); H01L 21/02527 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An ionization detector comprising:
a gate-insulator-substrate electron-emission structure (GIS-EE) configured to emit low-energy electrons;
a sample chamber configured for at least one gas to be detected, the sample chamber being adjacent to the GIS-EE; and
a measuring unit configured to detect and/or select charged particles, wherein the charged particles are due to the emitted electrons and/or comprise the emitted electrons,
wherein the GIS-EE comprises:
an electrically conductive substrate,
a transfer layer of a material with a band gap of at least 4 eV located on the substrate,
a gate electrode of a further electrically conductive material located directly on the transfer layer,
a first electrical connection structure located on the substrate, and
a second electrical connection structure located on the gate electrode.