| CPC H01J 1/16 (2013.01) [H01J 1/14 (2013.01)] | 20 Claims |

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1. A thermionic emission device, comprising:
a substrate layer;
an insulating layer deposited onto an uppermost surface of the substrate layer; and
an electron emitting layer deposited onto an uppermost surface of the insulating layer, wherein a particular portion of the electron emitting layer and a particular portion of the insulating layer comprise a beam suspended across a cavity in the substrate layer.
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