US 12,272,102 B2
Positioning method
Yoshimasa Kojima, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jun. 8, 2023, as Appl. No. 18/331,469.
Claims priority of application No. 2022-099554 (JP), filed on Jun. 21, 2022.
Prior Publication US 2023/0410370 A1, Dec. 21, 2023
Int. Cl. G06T 7/80 (2017.01); G06T 7/70 (2017.01); H01L 21/67 (2006.01); H04N 23/90 (2023.01)
CPC G06T 7/80 (2017.01) [G06T 7/70 (2017.01); H01L 21/67259 (2013.01); H04N 23/90 (2023.01); G06T 2207/30148 (2013.01); G06T 2207/30244 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A positioning method of positioning a reference position of a first image capturing unit and a reference position of a second image capturing unit with respect to each other in a processing apparatus,
the processing apparatus including a holding table that has a region made of a transparent material and that is capable of holding a workpiece under suction thereon, the holding table being rotatable about a predetermined rotational axis, the first image capturing unit disposed on the side of a surface of the holding table, and the second image capturing unit disposed on the side of another surface of the holding table, the rotational axis extending along a Z-axis perpendicular to an XY plane,
the positioning method comprising:
a first storing step of detecting coordinates (X10, Y10) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a first reference position;
a second storing step of detecting coordinates (X20, Y20) of a rotation center on the side of the other surface of the holding table, the coordinates (X20, Y20) corresponding to the coordinates (X10, Y10) on the XY plane, with the second image capturing unit and storing the detected coordinates as a second reference position;
after the first storing step and the second storing step, a third storing step of detecting coordinates (X11, Y11) of a rotation center on the side of the surface of the holding table with the first image capturing unit and storing the detected coordinates as a new first reference position;
after the first storing step and the second storing step, a fourth storing step of detecting coordinates (X21, Y21) of a rotation center on the side of the other surface of the holding table with the second image capturing unit and storing the detected coordinates as a new second reference position;
after the third storing step and the fourth storing step, a first deviation calculating step of calculating a first deviation between the coordinates (X10, Y10) and the coordinates (X11, Y11);
after the third storing step and the fourth storing step, a second deviation calculating step of calculating a second deviation between the coordinates (X20, Y20) and the coordinates (X21, Y21);
a first correcting step of correcting a coordinate system of images captured by the first image capturing unit, in order to eliminate the first deviation; and
a second correcting step of correcting a coordinate system of images captured by the second image capturing unit, in order to eliminate the second deviation.