US 12,271,448 B2
Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon
Hideji Naohara, Kyoto (JP); Tomonori Fujiwara, Kyoto (JP); Yumiko Hirato, Kyoto (JP); and Atsushi Sonoda, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Sep. 21, 2023, as Appl. No. 18/472,213.
Application 18/472,213 is a continuation of application No. 17/535,578, filed on Nov. 25, 2021, granted, now 11,829,451.
Application 17/535,578 is a continuation of application No. 16/543,611, filed on Aug. 18, 2019, granted, now 11,243,862, issued on Feb. 8, 2022.
Claims priority of application No. 2018-176256 (JP), filed on Sep. 20, 2018.
Prior Publication US 2024/0012880 A1, Jan. 11, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G05B 23/02 (2006.01); G06F 3/0482 (2013.01); G06F 11/32 (2006.01); G06F 18/00 (2023.01); G06F 18/2415 (2023.01)
CPC G06F 18/2415 (2023.01) [G06F 3/0482 (2013.01); G06F 11/324 (2013.01); G06F 18/00 (2023.01)] 20 Claims
OG exemplary drawing
 
1. A data processing method for processing time-series data acquired in a substrate processing apparatus including two or more processing units, the time-series data being data obtained from physical quantities measured using a sensor during execution of processing performed on one substrate in a processing unit, the method comprising:
obtaining evaluated values of the time-series data by comparing the time-series data with reference data, the reference data being other time-series data determined as expectation value data;
classifying the evaluated values into a plurality of levels; and
displaying an evaluation result screen including a display area including a first graph showing an occurrence rate of each level of the evaluated values, the evaluation result screen including the display area with respect to each of the two or more processing units,
wherein a plurality of the display areas are two-dimensionally disposed within the evaluation result screen,
a history screen displaying a history in which the evaluated values have been obtained and a trend screen including a graph showing temporal change in the evaluated values in addition to the evaluation result screen is hierarchically displayed, and
a mark is attached at a position corresponding to a processing result selected in the history screen on a broken line in the graph in the trend screen so that the position corresponding to the processing result selected in the history screen is ascertained.