US 12,271,117 B2
Support for an optical element
Toralf Gruner, Aalen-Hofen (DE); and Joachim Hartjes, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Apr. 5, 2023, as Appl. No. 18/296,186.
Application 18/296,186 is a continuation of application No. PCT/EP2021/078156, filed on Oct. 12, 2021.
Claims priority of application No. 102020212927.4 (DE), filed on Oct. 14, 2020.
Prior Publication US 2023/0236516 A1, Jul. 27, 2023
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70725 (2013.01) [G03F 7/70758 (2013.01); G03F 7/70825 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical arrangement, comprising:
a holding device configured to hold an optical element,
wherein:
the holding device comprises a holding element having first and second interface sections;
the first interface section defines a first interface by which the holding element, in an assembled state, is connected to the optical element;
the second interface section defines a second interface by which the holding element, in the assembled state, is connected to a support unit which is configured to connect the optical element to a support structure to support the optical element on the support structure via a supporting force;
the holding element is configured to be at least partially inserted into a cutout in the optical element;
the holding device comprises an actuator device which engages with the holding element between the first and second interfaces; and
the actuator device is configured to act, under control of a control device, on the holding element so that a definable interface deformation and/or a definable interface force distribution that acts on the optical element is set at the first interface.