US 12,271,108 B2
Apparatus for positioning and clamped curing
Martin Dieter Nico Peters, Vught (NL); and Marcellus Antonius De Folter, Son en Breugel (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/256,048
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jun. 3, 2019, PCT No. PCT/EP2019/064326
§ 371(c)(1), (2) Date Dec. 24, 2020,
PCT Pub. No. WO2020/007546, PCT Pub. Date Jan. 9, 2020.
Claims priority of application No. 18181606 (EP), filed on Jul. 4, 2018; application No. 18208040 (EP), filed on Nov. 23, 2018; application No. 18214483 (EP), filed on Dec. 20, 2018; and application No. 19153678 (EP), filed on Jan. 25, 2019.
Prior Publication US 2021/0271159 A1, Sep. 2, 2021
Int. Cl. B65G 47/92 (2006.01); G03B 1/00 (2021.01); G03B 27/52 (2006.01); G03B 27/58 (2006.01); G03F 1/64 (2012.01); G03F 1/66 (2012.01)
CPC G03F 1/64 (2013.01) [B65G 47/92 (2013.01); G03B 27/52 (2013.01); G03B 27/58 (2013.01); G03F 1/66 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus to grip an object, the apparatus comprising:
a first gripping member comprising a first magnetic element and moveable between a first position of the first gripping member and a second position of the first gripping member;
a first biasing member configured to bias the first gripping member toward the first position of the first gripping member; and
a second magnetic element selectively operable in a first mode, in which the second magnetic element interacts with the first magnetic element to overcome the first biasing member and move the first gripping member to the second position of the first gripping member, and a second mode, in which the second magnetic element does not overcome the first biasing member such that the first gripping member rests in the first position of the first gripping member,
wherein the second position corresponds to a gripping condition,
wherein the first gripping member pivots in movement between the first and second positions, and
wherein an imaginary line or arc of the movement passes both through a surface of the first gripping member arranged to contact the object and through the first magnetic element, the second magnetic element, or both the first and second magnetic elements.