US 12,270,989 B2
Stiffening structures for micro-electro-mechanical system (MEMS) micromirrors
Kenneth Alexander Diest, Kirkland, WA (US); Katherine Marie Smyth, Seattle, WA (US); and Daniel Guenther Greif, Redmond, WA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed on Feb. 28, 2022, as Appl. No. 17/682,800.
Prior Publication US 2023/0273424 A1, Aug. 31, 2023
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); G02B 26/10 (2006.01)
CPC G02B 26/0833 (2013.01) [B81B 3/007 (2013.01); B81C 1/00658 (2013.01); G02B 26/101 (2013.01); B81B 2201/042 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A micro-electromechanical system (MEMS) micromirror, comprising:
a mirror surface to reflect light;
a support platform coupled along the mirror surface; and
a plurality of stiffening structures formed from or coupled to the support platform, wherein a relative density of the stiffening structures scales inversely with a height of the stiffening structures as their positions move outward across an area of the support platform in a manner to assist in keeping the mirror surface flat under torsional force.