US 12,270,982 B1
Method, device and computer-readable storage medium for obtaining complex refractive index distribution profile of film
Jinlong Zhu, Hubei (CN); Zhe Yu, Hubei (CN); and Wenyu Chen, Hubei (CN)
Assigned to HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei (CN)
Filed by HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Hubei (CN)
Filed on Oct. 3, 2024, as Appl. No. 18/906,132.
Application 18/906,132 is a continuation of application No. PCT/CN2023/132594, filed on Nov. 20, 2023.
Claims priority of application No. 202311474098.X (CN), filed on Nov. 6, 2023.
Int. Cl. G02B 21/36 (2006.01); G02B 21/06 (2006.01); G02B 21/26 (2006.01)
CPC G02B 21/365 (2013.01) [G02B 21/06 (2013.01); G02B 21/26 (2013.01); G02B 21/361 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method for obtaining a complex refractive index distribution profile of a film, wherein the obtaining method comprises the following steps:
collecting an interference image of a reference area and a sample under test;
determining a normalized light intensity map and an optical path difference of a sample under test relative to the reference area through a recovery algorithm based on the obtained interference image;
establishing a measurement model based on a reflective film transmission matrix model;
determining a relationship between a measured reflection coefficient and an optical path difference of an area under test of the sample under test relative to the reference area and the measurement model;
calculating a complex refractive index distribution profile of a film under test based on the measured ratio of reflection coefficient and the optical path difference of the area under test of the film relative to the reference area and the relationship.