US 12,270,827 B2
Active bimodal AFM operation for measurements of optical interaction
Alexander A. Govyadinov, Haar (DE); Florian Huth, Haar (DE); Ivan Malovichko, Haar (DE); and Marcus Diem, Haar (DE)
Assigned to ATTOCUBE SYSTEMS AG, Haar (DE)
Appl. No. 17/602,261
Filed by Attocube Systems AG, Haar (DE)
PCT Filed Apr. 9, 2020, PCT No. PCT/EP2020/060132
§ 371(c)(1), (2) Date Oct. 7, 2021,
PCT Pub. No. WO2020/208133, PCT Pub. Date Oct. 15, 2020.
Claims priority of application No. 19168958 (EP), filed on Apr. 12, 2019.
Prior Publication US 2022/0163559 A1, May 26, 2022
Int. Cl. G01Q 60/34 (2010.01); G01Q 30/02 (2010.01); G01Q 60/30 (2010.01); G01Q 60/36 (2010.01); G01Q 60/38 (2010.01)
CPC G01Q 60/34 (2013.01) [G01Q 30/02 (2013.01); G01Q 60/30 (2013.01); G01Q 60/363 (2013.01); G01Q 60/38 (2013.01)] 17 Claims
OG exemplary drawing
 
1. Method for measuring dielectric properties of a sample with a scanning probe microscope comprising an oscillating cantilever probe, a sample and a source of electromagnetic radiation, which method comprises the steps of
a) inducing oscillations of the cantilever at at least two frequencies f1 and f2, wherein f1 is within a full width of a first mechanical oscillation resonance frequency fC1 of the cantilever and f2 is within a full width of a second mechanical oscillation resonance frequency fC2 of the cantilever;
b) interacting the probe with the sample;
c) illuminating the probe or a region of the sample, including an area of contact with the probe, with the electromagnetic radiation at a modulation frequency fm; and
d) measuring a change in the mechanical oscillation resonance frequencies of the cantilever fC1 or fC2, due to the modulated radiation at the modulation frequency fm, in order to determine dielectric properties of the sample.