| CPC G01N 3/068 (2013.01) [G01N 3/08 (2013.01); G01N 2203/0017 (2013.01); G01N 2203/0282 (2013.01); G01N 2203/0286 (2013.01); G01N 2203/0494 (2013.01); G01N 2203/0641 (2013.01); H01L 21/6836 (2013.01)] | 4 Claims |
|
1. An inspection apparatus for inspecting a tension of a tape adhered to an annular frame having, in a center thereof, an opening for accommodating a wafer, the inspection apparatus comprising:
a frame support section that supports the annular frame with the tape adhered thereto;
a light source that applies light toward the tape;
an imaging camera that captures, through the tape, the light applied from the light source;
a first polarizing plate disposed between the tape and the light source; and
a second polarizing plate that is disposed between the tape and the imaging camera and positioned in such a manner as to shield the light of linearly polarized light transmitted through the first polarizing plate,
wherein, in a case where distortion is generated in a polarization plane of the light due to application, onto the tape, of the light of the linearly polarized light transmitted through the first polarizing plate, the light is transmitted through the second polarizing plate, and the imaging camera images the transmitted light; and,
wherein, only where the tape has at least one nonuniform tension region, the imaging camera captures the light applied from the light source, and where the tape has uniform tension, the light applied by the light source is shielded by the first polarizing plate and the second polarizing plate and cannot be captured by the imaging camera.
|