US 12,270,748 B2
Method and apparatus for measuring particles
Amir A. Yasseri, San Jose, CA (US); Girish M. Hundi, Dublin, CA (US); John Michael Kerns, Livermore, CA (US); Duane Outka, Fremont, CA (US); John Daugherty, Fremont, CA (US); and Cliff La Croix, Livermore, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/273,264
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Sep. 5, 2019, PCT No. PCT/US2019/049783
§ 371(c)(1), (2) Date Mar. 3, 2021,
PCT Pub. No. WO2020/055665, PCT Pub. Date Mar. 19, 2020.
Claims priority of provisional application 62/730,320, filed on Sep. 12, 2018.
Prior Publication US 2021/0341377 A1, Nov. 4, 2021
Int. Cl. G01N 15/1434 (2024.01); G01N 1/22 (2006.01); G01N 15/14 (2024.01)
CPC G01N 15/1434 (2013.01) [G01N 1/2205 (2013.01); G01N 2015/1486 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An apparatus for measuring contamination on critical surfaces of a part for use in a processing chamber, wherein the part has critical surfaces, wherein the critical surfaces of the part are surfaces exposed to a plasma or process gas in the processing chamber, wherein the part is a gas injector, wherein the gas injector has a plurality of gas injection passages, comprising:
a vessel for mounting the part, wherein when the part is mounted in the vessel, the vessel only contacts the part outside of the critical surfaces, wherein the vessel is adapted to flow the inert gas past 90% to 100% of the critical surfaces of the part at one time, wherein the inert gas is flowed past all surfaces of the plurality of gas injection passages, wherein the inert gas is flowed past all surfaces of the plurality of gas injection passages at one time;
an inert gas source in fluid connection with the vessel and adapted to provide an inert gas to the vessel, wherein the critical surfaces of the part are exposed to the inert gas when the part is mounted in the vessel;
at least one seal to create a seal around the critical surfaces, wherein none of the at least one seal contacts the critical surfaces, wherein the critical surfaces of the part are surfaces exposed to a plasma or process gas in the processing chamber;
at least one diffuser for receiving the inert gas from the vessel; and
at least one analyzer adapted to receive the inert gas from the at least one diffuser and measure contaminants in the inert gas.