US 12,270,710 B2
Infrared imaging microbolometer and associated production methods
Willy Ludurczak, Lyons (FR); and Marc Guillaumont, Grenoble (FR)
Assigned to LYNRED, Palaiseau (FR)
Appl. No. 18/010,901
Filed by LYNRED, Palaiseau (FR)
PCT Filed Jul. 27, 2021, PCT No. PCT/FR2021/051401
§ 371(c)(1), (2) Date Dec. 16, 2022,
PCT Pub. No. WO2022/023664, PCT Pub. Date Feb. 3, 2022.
Claims priority of application No. 2008005 (FR), filed on Jul. 29, 2020; and application No. 2103820 (FR), filed on Apr. 14, 2021.
Prior Publication US 2023/0236065 A1, Jul. 27, 2023
Int. Cl. G01J 5/08 (2022.01); G01J 5/02 (2022.01); G01J 5/20 (2006.01)
CPC G01J 5/0853 (2013.01) [G01J 5/024 (2013.01); G01J 5/20 (2013.01)] 23 Claims
OG exemplary drawing
 
1. An infrared imaging microbolometer integrating a membrane assembled in suspension above a substrate by means of holding arms attached to anchoring nails, said membrane comprising:
a support layer crossed by the anchoring nails;
an absorber or electrode, deposited on the support layer and on the anchoring nails with a pattern forming at least two electrodes;
a dielectric layer deposited on said absorber or electrode and on the support layer;
at least two conductive vias formed through the dielectric layer in contact with said at least two electrodes; and
a thermometric or thermoresistive material arranged on a planar surface formed at the level of the upper ends of said conductive vias.