US 12,270,652 B2
4-points phase and sensitivity estimation algorithm and related architecture
Vito Avantaggiati, Rome (IT); Carlo Pinna, Milan (IT); and Federico Mazzarella, Binasco (IT)
Assigned to InvenSense, Inc., San Jose, CA (US)
Filed by InvenSense, Inc., San Jose, CA (US)
Filed on Nov. 14, 2022, as Appl. No. 17/986,598.
Claims priority of provisional application 63/282,050, filed on Nov. 22, 2021.
Prior Publication US 2023/0160696 A1, May 25, 2023
Int. Cl. G01C 19/5649 (2012.01); G01C 19/5656 (2012.01); G01C 19/5776 (2012.01); G01C 25/00 (2006.01)
CPC G01C 19/5649 (2013.01) [G01C 19/5656 (2013.01); G01C 19/5776 (2013.01); G01C 25/00 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A method, comprising:
imparting a drive signal to one or more drive electrodes of a microelectromechanical system (MEMS) sensor, the drive signal having a drive frequency;
applying a plurality of test signals to a proof mass sense signal to create a modified proof mass sense signal, wherein the plurality of test signals comprises a plurality of frequencies, each of the plurality of frequencies different from the drive frequency;
driving a gyroscope of the MEMS sensor based on the modified proof mass sense signal, thereby injecting the plurality of test signals into a proof mass output sense signal;
receiving the proof mass output sense signal from the MEMS sensor;
extracting an in-phase component and a quadrature component from the proof mass output sense signal;
processing the in-phase component and the quadrature component based on the plurality of frequencies of the plurality of test signals; and
determining a change in demodulation phase based on the processing of the in-phase component and the quadrature component.