US 12,270,638 B2
Measurement system and measurement method
Hsiang-Chun Wei, Hsinchu (TW); Chun-Wei Lo, Taichung (TW); Chung-Lun Kuo, New Taipei (TW); and Chih-Hsiang Liu, Hsinchu County (TW)
Assigned to Industrial Technology Research Institute, Hsinchu (TW)
Filed by Industrial Technology Research Institute, Hsinchu (TW)
Filed on Dec. 27, 2022, as Appl. No. 18/089,547.
Claims priority of application No. 111147905 (TW), filed on Dec. 14, 2022.
Prior Publication US 2024/0200935 A1, Jun. 20, 2024
Int. Cl. G01B 11/25 (2006.01); G01B 11/24 (2006.01)
CPC G01B 11/254 (2013.01) [G01B 11/2441 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A measurement system, comprising:
an excitation light source, configured to emit an excitation light beam;
an image sensor, configured to record an image of the excitation light beam passing through a glass substrate having a plurality of vias, wherein the image is a 2D interference pattern; and
a calculator, electrically connected to the image sensor,
wherein the calculator analyzes a 3D geometric-structure image of the vias in the glass substrate according to the image,
wherein the calculator uses a plurality of parameters to calculate a kernel of the glass substrate on any one of cutting planes, and then the kernel is used to calculate a cross-sectional image of the glass substrate on the any one of the cutting planes.