US 12,270,316 B2
Blade, processing system and processing method
Shinji Sato, Fukaya (JP)
Assigned to NIKON CORPORATION, Tokyo (JP)
Appl. No. 17/918,440
Filed by NIKON CORPORATION, Tokyo (JP)
PCT Filed Apr. 22, 2020, PCT No. PCT/JP2020/017293
§ 371(c)(1), (2) Date Dec. 5, 2022,
PCT Pub. No. WO2021/214900, PCT Pub. Date Oct. 28, 2021.
Prior Publication US 2023/0134254 A1, May 4, 2023
Int. Cl. F01D 5/14 (2006.01); B23K 26/38 (2014.01)
CPC F01D 5/147 (2013.01) [B23K 26/38 (2013.01); F05D 2230/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A blade for use in fluid, the blade comprising:
a base member; and
a coat layer that is formed on the base member, wherein
a plurality of first grooves, each of which has a first depth, and a plurality of second grooves, each of which has a second depth that is larger than the first depth, are formed on a surface of the coat layer,
a pitch of the plurality of first grooves is smaller than a pitch of the plurality of second grooves,
the plurality of first grooves include a groove configured to reduce a resistance of the coat layer to fluid, and
a direction along which at least one of the plurality of second grooves extends along the surface of the coat layer is different from a direction along which at least one of the plurality of first grooves extends along the surface of the coat layer.