US 12,270,105 B2
Method and apparatus for precursor gas injection
Alexander Groholski, Methuen, MA (US); Valery Ray, Methuen, MA (US); and Joseph Favata, Methuen, MA (US)
Assigned to MEO Engineering Company, Inc., Methuen, MA (US)
Filed by MEO Engineering Company, Inc., Methuen, MA (US)
Filed on Jan. 14, 2022, as Appl. No. 17/575,903.
Application 17/575,903 is a continuation of application No. 16/991,871, filed on Aug. 12, 2020, granted, now 11,261,527.
Claims priority of provisional application 63/035,074, filed on Jun. 5, 2020.
Claims priority of provisional application 62/885,795, filed on Aug. 12, 2019.
Prior Publication US 2022/0316062 A1, Oct. 6, 2022
Int. Cl. C23C 16/455 (2006.01)
CPC C23C 16/45574 (2013.01) 21 Claims
OG exemplary drawing
 
1. A gas injection system comprising:
a plurality of cartridge housings disposed within an external housing and being configured to accept a plurality of precursor cartridges comprising one or more precursor materials, the plurality of cartridge housings are configured to be heated so that one or more precursor gases are generated from the one or more precursor materials and;
a nozzle extending from the external housing, the nozzle having an internal delivery line and a tip configured for insertion into a sample chamber of a material processing apparatus such that the internal delivery line of the nozzle is in fluid communication with the sample chamber;
a delivery line in fluid communication with the plurality of precursor cartridges and the internal delivery line to fluidly connect with the sample chamber to deliver the one or more precursor gases produced from the one or more precursor materials to the sample chamber;
a first thermally conductive sheath disposed around the delivery line, the first thermally conductive sheath extending from the plurality of cartridge housings to the nozzle such that the first thermally conductive sheath is in thermal communication with the plurality of cartridge housings disposed in the external housing;
a second thermally conductive sheath disposed around the internal delivery line of the nozzle;
the nozzle further comprising an external tube disposed around the second thermally conductive sheath such that a space between the second thermally conductive sheath and the external tube defines a chamber under vacuum to remove convective heat transfer from the delivery line;
the nozzle further comprising an external heat spreader at the tip of the nozzle, the external heat spreader being conductively coupled to the second thermally conductive sheath; and
the nozzle further comprising a first heating element upstream of the external tube and a second heating element downstream of the external tube, the first heating element being associated with the second thermally conductive sheath and the second heating element being associated with the external heat spreader,
wherein, when the plurality of cartridge housings are heated to generate the one or more precursor gases, a difference in heat dissipation from the first heating element and the second heating element of the nozzle and the plurality of cartridge housings and the conduction of heat by the first thermally conductive sheath and second thermally conductive sheath creates a thermal gradient along the delivery line to maintain the delivery line at a preselected temperature to prevent condensation of the one or more precursor gases in the delivery line and the internal delivery line.