US 12,270,104 B2
Substrate with fluorinated yttrium coatings, and methods of preparing and using the substrates
Nilesh Gunda, North Chelmsford, MA (US); Jayasri Narayanamoorthy, Acton, MA (US); and Carlo Waldfried, Middleton, MA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Mar. 16, 2022, as Appl. No. 17/696,101.
Claims priority of provisional application 63/163,589, filed on Mar. 19, 2021.
Prior Publication US 2022/0298639 A1, Sep. 22, 2022
Int. Cl. C23C 16/56 (2006.01); C23C 14/08 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01)
CPC C23C 16/45553 (2013.01) [C23C 14/083 (2013.01); C23C 16/405 (2013.01); C23C 16/56 (2013.01); H01L 21/02274 (2013.01); H01L 21/0228 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A coated substrate comprising:
a substrate comprising high aspect ratio surfaces including a feature having an aspect ratio of least 2 to 1 and non-high aspect ratio surfaces which are not high aspect ratio surfaces; and
at least two coatings on the substrate, the coatings comprising:
a first yttrium oxide coating that covers high aspect ratio surfaces; and
a second yttrium oxide coating that covers non-high aspect ratio surfaces,
wherein an outermost portion of the coatings comprises fluorinated yttrium oxide at both high aspect ratio surfaces and non-high aspect ratio surfaces.