| CPC C23C 16/18 (2013.01) [C23C 16/455 (2013.01); H01M 10/0562 (2013.01); H01M 2300/0068 (2013.01)] | 18 Claims |

|
1. A method, comprising:
placing a lithium metal structure in a reactor;
flowing a metal-ligand precursor vapor in a carrier gas, the metal-ligand precursor vapor comprising a metal selected from Al, In, Ga, and Zn and a ligand selected from the group consisting of an alkyl, through the reactor at a temperature of 250-350° C. for a continuous flow time of 30-600 seconds; and
reacting the metal-ligand precursor vapor with lithium metal of the lithium metal structure, forming a lithium-metal-oxygen film on the lithium metal structure.
|