US 12,270,101 B2
Formation of lithium-metal-oxygen layer and removal of lithium carbonate on solid state electrolytes
Donghyeon Kang, Willowbrook, IL (US); Jeffrey W. Elam, Elmhurst, IL (US); Joseph A. Libera, Clarendon Hills, IL (US); Yujia Liang, Lisle, IL (US); HackSung Kim, Naperville, IL (US); and Anil U. Mane, Naperville, IL (US)
Assigned to UCHICAGO ARGONNE, LLC, Chicago, IL (US); and NORTHWESTERN UNIVERSITY, Evanston, IL (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US); and NORTHWESTERN UNIVERSITY, Evanston, IL (US)
Filed on Mar. 19, 2021, as Appl. No. 17/207,445.
Prior Publication US 2022/0298626 A1, Sep. 22, 2022
Int. Cl. C23C 16/18 (2006.01); C23C 16/455 (2006.01); H01M 10/0562 (2010.01)
CPC C23C 16/18 (2013.01) [C23C 16/455 (2013.01); H01M 10/0562 (2013.01); H01M 2300/0068 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method, comprising:
placing a lithium metal structure in a reactor;
flowing a metal-ligand precursor vapor in a carrier gas, the metal-ligand precursor vapor comprising a metal selected from Al, In, Ga, and Zn and a ligand selected from the group consisting of an alkyl, through the reactor at a temperature of 250-350° C. for a continuous flow time of 30-600 seconds; and
reacting the metal-ligand precursor vapor with lithium metal of the lithium metal structure, forming a lithium-metal-oxygen film on the lithium metal structure.