US 12,269,779 B2
Method for producing a ceramic matrix composite component
Paul Sheedy, Bolton, CT (US); Neal Magdefrau, Tolland, CT (US); and Wayde R. Schmidt, Pomfret Center, CT (US)
Assigned to RTX CORPORATION, Farmington, CT (US)
Filed by United Technologies Corporation, Farmington, CT (US)
Filed on Jan. 4, 2019, as Appl. No. 16/239,625.
Prior Publication US 2020/0216362 A1, Jul. 9, 2020
Int. Cl. C04B 35/622 (2006.01); C01B 32/956 (2017.01); C04B 35/515 (2006.01); C04B 35/565 (2006.01); C04B 35/628 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01); H01L 21/02 (2006.01)
CPC C04B 35/62222 (2013.01) [C04B 35/515 (2013.01); C04B 35/565 (2013.01); C04B 35/62231 (2013.01); C04B 35/62868 (2013.01); C23C 16/045 (2013.01); C23C 16/45527 (2013.01); C23C 16/45544 (2013.01); C23C 16/45553 (2013.01); C23C 16/45555 (2013.01); H01L 21/02529 (2013.01); C01B 32/956 (2017.08); C04B 2235/614 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A method of producing a ceramic matrix composite material component, comprising:
producing a preform having a ceramic matrix material interspersed within a fiber structure by subjecting the fiber structure, comprising one or more fibrous bundles, to a slurry including ceramic matrix particles, the one or more fibrous bundles having an intra-bundle porosity such that the preform is porous with internal voids;
applying at least one layer of a first material to the ceramic matrix material of the preform using an atomic layer deposition (ALD) process, subsequent to the step of producing the preform having the ceramic matrix material interspersed within the fiber structure by subjecting the fiber structure to the slurry, to decrease a porosity of the preform by decreasing the intra-bundle porosity of the one or more fibrous bundles;
applying one or more layers of a second material to the preform, subsequent to the ALD process, using a deposition process that deposits the second material in a non-self-limiting process comprising at least one of a chemical vapor infiltration process, a chemical vapor deposition process, or a polymer infiltration and pyrolysis process; and
applying at least one layer of a third material to the preform using said ALD process, subsequent to the step of applying the one or more layers of the second material to the preform using the deposition process, to decrease the porosity of the preform by filling voids created during the deposition process,
wherein the ceramic matrix material includes one or more ceramic precursor constituents,
the method further comprising applying one or more thermal treatments to the preform subsequent to the step of producing the preform and before the step of applying the at least one layer of the first material to the preform using the ALD process,
wherein applying the one or more thermal treatments to the preform converts the one or more ceramic precursor constituents into a ceramic form.