US 12,269,732 B2
MEMS microphone
Jien-Ming Chen, Tainan (TW); Chih-Yuan Chen, Tainan (TW); Feng-Chia Hsu, Tainan (TW); Wen-Shan Lin, Tainan (TW); and Nai-Hao Kuo, Tainan (TW)
Assigned to FORTEMEDIA, INC., Alviso, CA (US)
Filed by Fortemedia, Inc., Santa Clara, CA (US)
Filed on Dec. 30, 2021, as Appl. No. 17/565,773.
Claims priority of provisional application 63/209,440, filed on Jun. 11, 2021.
Prior Publication US 2022/0396469 A1, Dec. 15, 2022
Int. Cl. B81B 3/00 (2006.01); H04R 19/04 (2006.01)
CPC B81B 3/0021 (2013.01) [B81B 2201/0257 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/019 (2013.01); B81B 2203/0361 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical system (MEMS) microphone, comprising:
a substrate having an opening portion;
a backplate disposed on a side of the substrate, with protrusions protruding toward the substrate;
a diaphragm movably disposed between the substrate and the backplate and spaced apart from the backplate by a spacing distance,
wherein the protrusions are configured to limit deformation of the diaphragm when air flows through the opening portion;
a central pillar connected between the backplate and the diaphragm; and
an island structure on an upper surface of the diaphragm, and the island structure is disposed symmetrically around the central pillar,
wherein the island structure comprises a plurality of island blocks aligned to each of the protrusions, and each of the island blocks spans more than one of the protrusions when viewed in a direction perpendicular to the diaphragm.