US 12,269,282 B2
Nanoimprint lithography template with peripheral pockets, system of using the template, and method of using the template
Anshuman Cherala, Austin, TX (US)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 15, 2021, as Appl. No. 17/502,370.
Prior Publication US 2023/0120053 A1, Apr. 20, 2023
Int. Cl. B41N 1/14 (2006.01); G03F 7/00 (2006.01)
CPC B41N 1/14 (2013.01) [G03F 7/0002 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A nanoimprint lithography template comprising:
a body having a front side with a shaping surface, and
a back side having a central core-out that is located opposite the shaping surface;
a first peripheral region bounded by:
the central core-out;
a first edge of the template; and
a first set of two parallel perimeter lines orthogonal to the first edge and extending from the first edge to the central core-out; and
a first peripheral pocket positioned in the first peripheral region.