US 12,269,140 B2
Substrate polishing apparatus
Seungbae Kang, Suwon-si (KR); Joon-hwa Bae, Suwon-si (KR); Heesung Yang, Seoul (KR); Woojin Cho, Yongin-si (KR); and Byoungkwon Choo, Hwaseong-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on May 14, 2019, as Appl. No. 16/411,141.
Claims priority of application No. 10-2018-0071878 (KR), filed on Jun. 22, 2018.
Prior Publication US 2019/0389027 A1, Dec. 26, 2019
Int. Cl. B24B 7/24 (2006.01); B24B 27/00 (2006.01); B24B 29/02 (2006.01); B24B 37/04 (2012.01); B24B 41/047 (2006.01)
CPC B24B 29/02 (2013.01) [B24B 7/242 (2013.01); B24B 27/0076 (2013.01); B24B 41/047 (2013.01); B24B 41/0475 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A substrate polishing apparatus, comprising:
a stage having a flat surface, which is parallel to a first direction and a second direction, and configured to support a substrate;
a pressing unit configured to exert a pressure on the substrate in a third direction perpendicular to the first and second directions at a position overlapping the stage;
a rotary unit connected to the pressing unit, the rotary unit being configured to revolve the pressing unit around a central axis parallel to the third direction, when viewed in a plan view;
a plurality of polishing pads provided between the pressing unit and the substrate and used to polish the substrate; and
a nozzle part configured to supply a slurry onto the substrate,
wherein:
the polishing pads are spaced apart from each other in a direction parallel to a motion of the substrate;
when measured in the second direction, a length of each of the polishing pads is greater than a length of the substrate;
each of the polishing pads has a rectangular shape in a plan view;
the rotary unit comprises a body part and a rotary part that executes a circular motion about the central axis with respect to the body part;
the rotary part includes a rectangular portion that is longer in the second direction than the first direction;
the body part defines a ring-shaped groove on a surface thereof facing the third direction; and
wherein the rotary part includes a circular portion coupled to the body part so as to be movable within the ring-shaped groove.