| CPC B23K 26/402 (2013.01) [B23K 26/082 (2015.10); B23K 26/083 (2013.01); B23K 26/702 (2015.10); B23K 26/703 (2015.10); C03B 33/082 (2013.01); B23K 2101/36 (2018.08); H01L 25/18 (2013.01); H10K 77/111 (2023.02)] | 12 Claims |
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1. A laser apparatus comprising:
a stage;
a laser provider above the stage and configured to provide a laser beam;
a scanner configured to adjust an optical path of the laser beam such that the laser beam is irradiated to an irradiation line formed above the stage; and
a controller to control an operation of the scanner,
wherein the scanner includes a shutter located on an optical path of the laser beam emitted from the laser providing unit provider and configured to perform an opening/closing operation,
wherein the controller calculates a processing area to which the laser beam is irradiated and a non-processing area to which the laser beam is not irradiated, and
wherein, when a position of a target aiming point of the laser beam is located in the processing area, the controller controls to open the shutter if a moving speed of the target aiming point of the laser beam is higher than or equal to a reference speed, and to close the shutter if the moving speed of the target aiming point of the laser beam is lower than the reference speed.
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