US 12,269,104 B2
Multiwire electric discharge machine, multiwire electric discharge machining method, and semiconductor wafer manufacturing method
Atsushi Itokazu, Tokyo (JP); Yoichi Otomo, Tokyo (JP); and Tsubasa Yagi, Tokyo (JP)
Assigned to MITSUBISHI ELECTRIC CORPORATION, Tokyo (JP)
Appl. No. 18/710,263
Filed by Mitsubishi Electric Corporation, Tokyo (JP)
PCT Filed Mar. 24, 2022, PCT No. PCT/JP2022/014162
§ 371(c)(1), (2) Date May 15, 2024,
PCT Pub. No. WO2023/181305, PCT Pub. Date Sep. 28, 2023.
Prior Publication US 2024/0326145 A1, Oct. 3, 2024
Int. Cl. B23H 7/10 (2006.01); B23H 1/02 (2006.01); B23H 7/06 (2006.01)
CPC B23H 7/105 (2013.01) [B23H 1/028 (2013.01); B23H 7/065 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A multiwire electric discharge machine comprising:
a wire electrode comprising a plurality of wire cutting sections;
a plurality of guide rollers comprising a first guide roller and a second guide roller, the plurality of guide rollers being for guiding traveling of the wire electrode, the wire electrode being wound around the plurality of guide rollers multiple times at intervals;
a machining power supply to apply a voltage between each of the plurality of cutting wire sections and a workpiece having a curved surface, the plurality of cutting wire sections being parallel sections of the wire electrode between the first guide roller and the second guide roller;
a dummy workpiece including a contact surface, the contact surface being curved in such a way as to be capable of coming into contact with the curved surface of the workpiece except for an end point of the workpiece, the end point of the workpiece being to be reached by each of the plurality of cutting wire sections when machining of the workpiece is completed, the dummy workpiece supporting the workpiece from one side in a first direction, the first direction being a direction in which the workpiece moves with respect to the plurality of cutting wire sections; and
a pressing mechanism including a pressing portion capable of coming into contact with the curved surface of the workpiece, the pressing mechanism pressing the workpiece against the dummy workpiece by bringing the pressing portion into direct contact with the workpiece from a side opposite to the dummy workpiece.