US 12,269,095 B2
Process chamber component and method of forming a surface texture
Olivier Marchand, Genoble (FR)
Assigned to Cleanpart Group GmbH, Asperg (DE)
Filed by Cleanpart Group GmbH, Asperg (DE)
Filed on Dec. 27, 2019, as Appl. No. 16/728,118.
Application 16/728,118 is a continuation of application No. PCT/EP2018/068083, filed on Jul. 4, 2018.
Claims priority of application No. PCT/EP2017/066669 (WO), filed on Jul. 4, 2017.
Prior Publication US 2020/0176225 A1, Jun. 4, 2020
Int. Cl. B22F 5/10 (2006.01); B22F 10/25 (2021.01); B22F 10/28 (2021.01); B22F 10/68 (2021.01); B22F 12/53 (2021.01); B23K 26/352 (2014.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 80/00 (2015.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01)
CPC B22F 5/106 (2013.01) [B22F 10/25 (2021.01); B22F 10/28 (2021.01); B23K 26/355 (2018.08); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 80/00 (2014.12); C23C 14/564 (2013.01); C23C 16/4404 (2013.01); H01J 37/32477 (2013.01); H01J 37/32871 (2013.01); B22F 10/68 (2021.01); B22F 12/53 (2021.01); H01J 2237/022 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method of forming a surface texture on a process chamber component in the form of an annular shield element for use in a substrate processing chamber which is designed for manufacturing wafers, chips or dies, the process chamber component having at least one component surface, the method comprising the step of forming the surface texture on the at least one component surface so as to define at least one recess in the surface texture and so that a total surface area defined by the surface texture is greater than a total surface area defined by the at least one component surface,
wherein:
the surface texture is applied to the at least one component surface by additive manufacturing;
the surface texture is applied to the at least one component surface without modifying or damaging the at least one component surface;
the surface texture is formed by applying at least one three-dimensional element to the component surface;
the at least one three-dimensional element is formed as a projection extending parallel or transversely with respect to the at least one component surface;
a plurality of layers are formed on the at least one component surface for forming a multi-layer surface texture;
the at least one three-dimensional element is formed by the plurality of layers applied on top of each other;
at least one of the projection and the plurality of layers is manufactured in the form of a first plurality of parallel wires and a second plurality of parallel wires that are arranged to cross each other substantially perpendicularly;
each of the layers applied one on top of the other for forming a three-dimensional element has a width in a direction parallel or substantially parallel to the at least one component surface,
the layers are applied with a constant or increasing width with an increasing distance of each respective layer from the component surface;
the at least one three-dimensional element is made with a cross section in the form of a mushroom.