US 12,268,555 B2
Flexible sensor
Tingting Zhou, Beijing (CN); Kuanjun Peng, Beijing (CN); Fangzhen Zhang, Beijing (CN); Yanan Niu, Beijing (CN); Jintao Peng, Beijing (CN); Jing Niu, Beijing (CN); Shuang Sun, Beijing (CN); Lubin Shi, Beijing (CN); and Jinyu Ren, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 17/416,712
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed Sep. 28, 2020, PCT No. PCT/CN2020/118434
§ 371(c)(1), (2) Date Jun. 21, 2021,
PCT Pub. No. WO2022/061897, PCT Pub. Date Mar. 31, 2022.
Prior Publication US 2022/0354461 A1, Nov. 10, 2022
Int. Cl. A61B 8/00 (2006.01); A61B 8/08 (2006.01); B06B 1/02 (2006.01); B06B 1/06 (2006.01)
CPC A61B 8/4494 (2013.01) [B06B 1/0207 (2013.01); B06B 1/0622 (2013.01); A61B 8/085 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A flexible sensor, comprising:
a flexible substrate;
a plurality of ultrasonic detectors on stacked film layers on the flexible substrate; and
a plurality of detection circuits in the stacked film layers, respectively corresponding to the plurality of ultrasonic detectors;
wherein:
each detection circuit of the plurality of detection circuits is between the flexible substrate and an ultrasonic detector of the plurality of ultrasonic detectors, and configured to drive the ultrasonic detector of the plurality of ultrasonic detectors to emit ultrasonic waves, and detect a detection signal output by the ultrasonic detector after the ultrasonic detector receives the ultrasonic waves; and the ultrasonic detector of the plurality of ultrasonic detectors corresponds to a detection circuit of the plurality of detection circuits;
the plurality of ultrasonic detectors comprises: a plurality of raised ultrasonic detectors and at least one recessed ultrasonic detector; wherein,
each of the plurality of raised ultrasonic detectors comprises:
a first supporting structure located on the flexible substrate and protruding along a direction pointing from the flexible substrate to the plurality of ultrasonic detectors, wherein the first supporting structure is a raised structure;
a first electrode located on a side of the first supporting structure away from the flexible substrate and coupled to one detection circuit of the plurality of detection circuits;
a second electrode on a side of the first electrode away from the flexible substrate; and
a piezoelectric induction layer between the first electrode and the second electrode; and
each of the at least one recessed ultrasonic detector comprises:
a second supporting structure located on the flexible substrate and concaved along the direction pointing from the flexible substrate to the plurality of ultrasonic detectors, wherein the second supporting structure is a recessed structure having a groove on a side away from the flexible substrate;
a first electrode located on a side of the second supporting structure away from the flexible substrate and coupled to another detection circuit of the plurality of detection circuits;
a second electrode on a side of the first electrode away from the flexible substrate; and
a piezoelectric induction layer between the first electrode and the second electrode;
the plurality of raised ultrasonic detectors surrounds each of the at least one recessed ultrasonic detector;
a size of an orthographic projection of each of the plurality of raised ultrasonic detectors on the flexible substrate is smaller than a size of an orthographic projection of each of the at least one recessed ultrasonic detector on the flexible substrate; and
a plurality of holes extend through at least a part of the stacked film layers, and an orthographic projection of the plurality of detection circuits on the flexible substrate is not overlapped with an orthographic projection of the plurality of holes on the flexible substrate.