US 11,950,384 B2
Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
Akshay Gunaji, Karnataka (IN); Uday Pai, San Jose, CA (US); Timothy J. Roggenbuck, Beaverton, OR (US); Sanjeev Baluja, Campbell, CA (US); Kalesh Panchaxari Karadi, Karnataka (IN); and Tejas Ulavi, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 31, 2023, as Appl. No. 18/103,812.
Application 18/103,812 is a continuation of application No. 17/009,652, filed on Sep. 1, 2020, granted, now 11,602,064.
Prior Publication US 2023/0175131 A1, Jun. 8, 2023
Int. Cl. H05K 5/02 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); H02G 3/04 (2006.01)
CPC H05K 5/0247 (2013.01) [C23C 16/45544 (2013.01); C23C 16/4588 (2013.01); H02G 3/0437 (2013.01); C23C 16/4586 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A cable management system comprising:
an outer trough assembly comprising an outer guide having a semi-cylindrical shape with a central axis, an inner surface and an outer surface; and
an inner trough assembly positioned within the outer trough assembly, the inner trough assembly comprising a mounting bracket having an inner surface and an outer surface,
wherein a channel is formed between the inner surface of the outer guide of the outer trough assembly and the outer surface of the mounting bracket, and
wherein the mounting bracket of the inner trough assembly has a top portion and a bottom portion connected to a base, the base having a top surface and a bottom surface, the bottom surface of the base connected to a top surface of a bottom plate.