CPC H04R 17/02 (2013.01) [H04R 7/06 (2013.01); H04R 31/003 (2013.01); H10N 30/05 (2023.02); H10N 30/074 (2023.02); H10N 30/082 (2023.02); H04R 17/025 (2013.01); H04R 31/00 (2013.01); H04R 2201/003 (2013.01); H04R 2410/03 (2013.01)] | 15 Claims |
1. A transducer, comprising:
a substrate having a region; and
a plurality of cantilevered beams, each cantilevered beam of the plurality of cantilevered beams comprising:
at least one piezoelectric layer interspersed between electrode layers, wherein the electrode layers cover two-thirds or less of each cantilevered beam of the plurality of cantilevered beams; and
a tapered beam body that extends from a beam base portion to a beam tip portion over the region, with beam base portions supported over portions of the substrate, and with beam tip portions extending towards a common area.
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