US 11,949,402 B2
Resonators with different membrane thicknesses on the same die
Patrick Turner, San Bruno, CA (US); Doug Jachowski, Santa Cruz, CA (US); and Bryant Garcia, Burlingame, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by MURATA MANUFACTURING CO., LTD, Kyoto (JP)
Filed on Dec. 17, 2020, as Appl. No. 17/125,960.
Claims priority of provisional application 63/087,792, filed on Oct. 5, 2020.
Claims priority of provisional application 63/072,595, filed on Aug. 31, 2020.
Prior Publication US 2022/0069801 A1, Mar. 3, 2022
Int. Cl. H03H 9/205 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/58 (2006.01); H03H 9/60 (2006.01)
CPC H03H 9/205 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02157 (2013.01); H03H 9/02228 (2013.01); H03H 9/588 (2013.01); H03H 9/605 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A filter device comprising:
a substrate having at least a first cavity and a second cavity on a single die;
a first piezoelectric plate spanning the first cavity and the second cavity;
a bonding layer spanning the first cavity and the second cavity; and
a second piezoelectric plate spanning the first cavity but not the second cavity;
a first interdigital transducer (IDT) on a front surface of the second piezoelectric plate over the first cavity; and
a second IDT on a front surface of the bonding layer over the second cavity.