CPC H03H 9/205 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02157 (2013.01); H03H 9/02228 (2013.01); H03H 9/588 (2013.01); H03H 9/605 (2013.01)] | 23 Claims |
1. A filter device comprising:
a substrate having at least a first cavity and a second cavity on a single die;
a first piezoelectric plate spanning the first cavity and the second cavity;
a bonding layer spanning the first cavity and the second cavity; and
a second piezoelectric plate spanning the first cavity but not the second cavity;
a first interdigital transducer (IDT) on a front surface of the second piezoelectric plate over the first cavity; and
a second IDT on a front surface of the bonding layer over the second cavity.
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