US 11,949,203 B2
Gas management system
Yzzer Roman Gutierrez, Escondido, CA (US); Walter Dale Gillespie, Poway, CA (US); Edward Siqi Luo, San Diego, CA (US); and Dinesh Adinath Kanawade, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 16/965,461
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed Jan. 10, 2019, PCT No. PCT/US2019/012999
§ 371(c)(1), (2) Date Jul. 28, 2020,
PCT Pub. No. WO2019/160627, PCT Pub. Date Aug. 22, 2019.
Claims priority of provisional application 62/630,932, filed on Feb. 15, 2018.
Prior Publication US 2020/0358241 A1, Nov. 12, 2020
Int. Cl. H01S 3/00 (2006.01); B01D 53/04 (2006.01); B01D 53/30 (2006.01); B01F 23/10 (2022.01); B01F 35/21 (2022.01); B01F 35/221 (2022.01); G01N 33/00 (2006.01); H01S 3/036 (2006.01); H01S 3/225 (2006.01)
CPC H01S 3/036 (2013.01) [B01D 53/04 (2013.01); B01D 53/30 (2013.01); B01F 23/191 (2022.01); B01F 35/2132 (2022.01); B01F 35/2211 (2022.01); G01N 33/0004 (2013.01); H01S 3/225 (2013.01); B01D 2253/104 (2013.01); B01D 2256/18 (2013.01); B01D 2257/102 (2013.01); B01D 2257/104 (2013.01); B01D 2257/204 (2013.01); B01D 2257/2066 (2013.01); B01D 2257/504 (2013.01); B01D 2257/553 (2013.01); B01D 2257/80 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A gas chamber supply system comprising:
a first gas source configured to fluidly connect to a first inlet of a first gas chamber and configured to supply a first gas mixture that contains a first plurality of gases, at least one of the gases in the first plurality includes a halogen;
a second gas source configured to fluidly connect to a second inlet of the first gas chamber and configured to supply a second gas mixture that contains a second plurality of gases, the second plurality of gases lacking a halogen, the second gas source comprising:
a pre-prepared gas supply including the second gas mixture;
a recycled gas supply including the second gas mixture; and
a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply;
a gas analysis system that receives a sample of the recycled gas supply and analyzes gas components within the recycled gas supply; and
a control system connected to the gas analysis system and to the fluid flow switch and configured to:
receive the analysis from the gas analysis system;
determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and
provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply as the second gas source based on the determination.