US 11,948,985 B2
Ion implant defined nanorod in a suspended Majorana fermion device
Steven J. Holmes, Ossining, NY (US); Devendra K. Sadana, Pleasantville, NY (US); Sean Hart, Tarrytown, NY (US); Patryk Gumann, Tarrytown, NY (US); Stephen W. Bedell, Wappingers Falls, NY (US); and Ning Li, White Plains, NY (US)
Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Apr. 18, 2022, as Appl. No. 17/659,519.
Application 17/659,519 is a continuation of application No. 16/688,386, filed on Nov. 19, 2019, granted, now 11,316,022.
Prior Publication US 2022/0238663 A1, Jul. 28, 2022
Int. Cl. H01L 29/41 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01L 29/06 (2006.01); H10N 60/01 (2023.01); H10N 60/84 (2023.01)
CPC H01L 29/413 (2013.01) [B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01L 29/0673 (2013.01); H10N 60/0912 (2023.02); H10N 60/84 (2023.02)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a quantum device suspended within the device, wherein the quantum device comprises an ion implanted region; and
an expanded electrode layer coupled to the quantum device, wherein the expanded electrode layer comprises a quasiparticle gettering structure that repels quasiparticles from migrating to the ion implanted region.