CPC H01L 27/14603 (2013.01) [H01L 27/14614 (2013.01); H01L 27/14623 (2013.01); H01L 27/14659 (2013.01); H01L 27/14663 (2013.01)] | 11 Claims |
1. A detection substrate, comprising:
a base substrate;
a plurality of detection pixel circuits, arranged on the base substrate;
a first passivation layer, arranged on a side, facing away from the base substrate, of the plurality of detection pixel circuits;
a planarization layer, arranged on a side, facing away from the base substrate, of the first passivation layer; wherein a surface of the side, facing away from the first passivation layer, of the planarization layer is a plane, and the planarization layer is a lightproof resin layer; and
a plurality of photosensitive devices;
wherein the plurality of photosensitive devices are electrically connected to the plurality of detection pixel circuits in a one-to-one correspondence through vias penetrating through the first passivation layer and the planarization layer;
each of the plurality of photosensitive devices comprises a first portion and a second portion;
an orthographic projection of the first portion on the base substrate and an orthographic projection of a detection pixel circuit correspondingly electrically connected with the first portion on the base substrate overlap each other; and
an orthographic projection of the second portion on the base substrate and an orthographic projection of a detection pixel circuit correspondingly electrically connected with the second portion on the base substrate do not overlap each other.
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