CPC H01L 22/12 (2013.01) [G01B 11/306 (2013.01); H01L 21/02422 (2013.01)] | 18 Claims |
1. A device for testing flatness, comprising:
a base;
a testing platform assembled on the base, wherein the testing platform comprises a supporting structure, the supporting structure is disposed on a side of the testing platform away from the base, and is used to support the to-be-tested board, and the supporting structure matches with a structure of the to-be-tested board;
a ranging sensor disposed on a side of the testing platform away from the base, wherein after the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2.
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