US 11,948,845 B2
Device and system for testing flatness
Shaodong Sun, Beijing (CN); Haoran Gao, Beijing (CN); Guangcai Yuan, Beijing (CN); Lilei Zhang, Beijing (CN); Wenyue Fu, Beijing (CN); Li Li, Beijing (CN); Hanbo Zheng, Beijing (CN); Shuqi Liu, Beijing (CN); Qi Qi, Beijing (CN); Junwei Yan, Beijing (CN); Pingkuan Gu, Beijing (CN); Lina Jing, Beijing (CN); Yan Chen, Beijing (CN); and Yimin Chen, Beijing (CN)
Assigned to BOE Technology Group Co., Ltd., Beijing (CN)
Filed by BOE Technology Group Co., Ltd., Beijing (CN)
Filed on Sep. 23, 2021, as Appl. No. 17/483,613.
Claims priority of application No. 202120233157.4 (CN), filed on Jan. 27, 2021.
Prior Publication US 2022/0238391 A1, Jul. 28, 2022
Int. Cl. G01B 11/30 (2006.01); H01L 21/66 (2006.01); H01L 21/02 (2006.01)
CPC H01L 22/12 (2013.01) [G01B 11/306 (2013.01); H01L 21/02422 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A device for testing flatness, comprising:
a base;
a testing platform assembled on the base, wherein the testing platform comprises a supporting structure, the supporting structure is disposed on a side of the testing platform away from the base, and is used to support the to-be-tested board, and the supporting structure matches with a structure of the to-be-tested board;
a ranging sensor disposed on a side of the testing platform away from the base, wherein after the to-be-tested board is placed on the testing platform, the ranging sensor is used to test distances between a number N of to-be-tested positions on the to-be-tested board and the ranging sensor, to obtain N pieces of distance information, and the N pieces of distance information are used to determine the flatness of the to-be-tested board, where N is an integer greater than 2.