US 11,948,826 B2
High power electrostatic chuck design with radio frequency coupling
Jaeyong Cho, San Jose, CA (US); Vijay D. Parkhe, San Jose, CA (US); Haitao Wang, Fremont, CA (US); Kartik Ramaswamy, San Jose, CA (US); and Chunlei Zhang, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Nov. 11, 2022, as Appl. No. 17/985,764.
Application 17/985,764 is a division of application No. 15/383,035, filed on Dec. 19, 2016, granted, now 11,532,497.
Claims priority of provisional application 62/352,667, filed on Jun. 21, 2016.
Claims priority of provisional application 62/346,746, filed on Jun. 7, 2016.
Prior Publication US 2023/0072594 A1, Mar. 9, 2023
Int. Cl. H01L 21/683 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); C23C 16/505 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [C23C 16/4586 (2013.01); C23C 16/4587 (2013.01); C23C 16/466 (2013.01); C23C 16/505 (2013.01); H01J 37/32697 (2013.01); H01J 37/32724 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of processing a workpiece in a plasma processing chamber, the method comprising:
driving a first electrode in a top plate of an electrostatic chuck at a first voltage to grip the workpiece, the first electrode being near a top surface of the top plate; and
driving a second electrode in the top plate at the first voltage to form a Faraday cage together with the first electrode within the top plate, wherein the electrostatic chuck comprises a base plate, the top plate, the first electrode in the top plate proximate the top surface of the top plate, the first electrode having a width, and the first electrode comprising a first web of a plurality of usually orthogonal crossing wires extending across the width of the first electrode, the second electrode in the top plate and spaced apart from the first electrode and below the first electrode, the second electrode having a width greater than the width of the first electrode, and the second electrode comprising a second web of a plurality of usually orthogonal crossing wires extending across the width of the second electrode, wherein the width of the second electrode is greater than a width of the workpiece, a plurality of conductive pegs electrically connecting the first electrode to the second electrode, wherein the first electrode, the second electrode and the plurality of conductive pegs form the Faraday cage, and a plurality of lift pin holes extending through the Faraday cage, each of the plurality of lift pin holes off-set from a center of the Faraday cage.