US 11,948,614 B2
Methods of manufacturing at least a portion of a magnetic layer of a magnetic recording disk, and related magnetic recording disks
Xiaomin Yang, Livermore, CA (US); Kim Yang Lee, Fremont, CA (US); Thomas Young Chang, Menlo Park, CA (US); ShuaiGang Xiao, San Ramon, CA (US); and Sha Zhu, Fremont, CA (US)
Assigned to Seagate Technology LLC, Fremont, CA (US)
Filed by Seagate Technology LLC, Fremont, CA (US)
Filed on Feb. 21, 2022, as Appl. No. 17/676,664.
Prior Publication US 2023/0267959 A1, Aug. 24, 2023
Int. Cl. G11B 5/84 (2006.01); G03F 7/00 (2006.01); G03F 7/36 (2006.01)
CPC G11B 5/84 (2013.01) [G03F 7/0002 (2013.01); G03F 7/36 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing at least a portion of a magnetic layer of a magnetic recording disk, wherein the method comprises:
providing a substrate having at least a first major surface;
forming a pattern on the first major surface of the substrate, wherein the pattern comprises a plurality of sacrificial, discrete structures, wherein each sacrificial, discrete structure comprises imprint resist material, wherein each sacrificial, discrete structure extends from a first radius of the recording disk to a second radius of the recording disk, and wherein each sacrificial, discrete structure comprises:
a base in contact with the first major surface of the substrate; and
an exterior surface having a shape, wherein the exterior surface comprises an end that is opposite the base;
depositing at least one layer of segregant material so that the at least one layer of segregant material conforms to the shape of the exterior surface of each sacrificial, discrete structure;
removing a portion of the at least one layer of segregant material in a direction from the end of each sacrificial, discrete structure toward the substrate to expose at least the end of each sacrificial, discrete structure, wherein a portion of the at least one layer of segregant material remains to define a plurality of three-dimensional segregant structures in contact with the first major surface of the substrate; and
removing each sacrificial, discrete structure to expose the substrate and so that each three-dimensional segregant structure has at least two sidewalls that protrude from the substrate, wherein each three-dimensional segregant structure extends from the first radius of the recording disk to the second radius of the recording disk.