CPC G06N 3/04 (2013.01) [G05B 19/4189 (2013.01); G06N 3/08 (2013.01); G06V 10/82 (2022.01); G05B 2219/32335 (2013.01); G05B 2219/45031 (2013.01)] | 20 Claims |
1. A method for detecting anomalies in a manufacturing process of a substrate comprising:
feeding at least one input time-series trace from one or more sensors associated with one or more manufacturing tools configured to manufacture the substrate to a neural network;
generating, by the neural network, at least one output time-series trace based on the at least one input time-series trace;
calculating an error between a first input time-series trace of the at least one input time-series trace and a corresponding first output time-series trace of the at least one output time-series trace; and
performing a corrective action based on the error.
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