US 11,947,267 B2
Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus
Atsushi Shigenobu, Tochigi (JP); and Fuma Kizu, Tochigi (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Sep. 26, 2022, as Appl. No. 17/952,380.
Claims priority of application No. 2021-163069 (JP), filed on Oct. 1, 2021.
Prior Publication US 2023/0108056 A1, Apr. 6, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/705 (2013.01) 13 Claims
OG exemplary drawing
 
1. A method of obtaining an array of a plurality of regions on a substrate, comprising:
calculating, using an objective function, which includes a loss function which includes, as variables, a plurality of coefficients included in a regression model used to estimate the array and obtains the plurality of coefficients, and a regularization term used to limit values of the plurality of coefficients, and position measurement data of a mark assigned to a sample region among a plurality of regions on a first substrate, the plurality of coefficients included in the regression model, with which the objective function becomes not more than a reference value;
extracting, a coefficient not less than a threshold value from the plurality of coefficients calculated in the calculating; and
obtaining, using a regression model including only the coefficient extracted in the extracting and position measurement data of a mark assigned to a sample region among a plurality of regions on a second substrate, an array of the plurality of regions on the second substrate.